header
Back to home page Back to Praxair Corporate Site Welding Supplies Specialty Gases and Equipment Back to Cart Praxair Direct Price Quote Button Sign in Register Contact Us Store Locator Home Resource Center

For questions about Praxair products
please call 1-877-PRAXAIR or email us.

Tetrafluoromethane

 

 

Tetrafluoromethane, also known as Halocarbon 14, is a flammable, nontoxic, colorless gas at room temperature and atmospheric pressure. Tetrafluoromethane is extremely reactive and is capable of explosive violence with polymerization. This gas should be used in a well ventilated area. Under high pressure, the gas can cause dizziness, drowsiness and rapid suffocation. Lack of oxygen can kill. For more information visit our MSDS database.

 

Transportation Information

US Shipping Name Hazard Class Label UN Number
Tetrafluoromethane 2.2 Nonflammable Gas 1982
Formula MSDS CAS Number General Description
CF4 P-4665 75 - 73 - 0 Colorless, nonflammable gas.

 

Product and Package Information

Part Number Product Grade Quality Assay/Specification Cylinder Style Content Regulator Recommendations
HA 14 4.7SP 4.7  Semiconductor Process Gas 99.997 %
Ar + O2 < 5 ppm
CO < 1 ppm
CH4 < 1 ppm
SF6 < 1 ppm
H2O < 1 ppm
CO2 < 1 ppm
N2 < 15 ppm
Other Halocarbons < 4 ppm*
Acidity (HF) < 0.1 ppmw
AT
K
72 lb
65 lb
Valve Panels
7000 Series: Semiconductor
4000 Series: Non-corrosive
HA 14 3.7SP 3.7  Semiconductor Process Gas 99.97 %
O2 + Ar < 40 ppm
N2 < 150 ppm
CO < 10 ppm
CO2 < 2 ppm
SF6 < 5 ppm
H2O < 1 ppm
Other Halocarbons < 4 ppm*
Acidity (HF) < 0.1 ppmw
AT
K
72 lb
65 lb
Valve Panels
7000 Series: Semiconductor
4000 Series: Non-corrosive
3000 Series: Non-corrosive

* Other Halocarbons defined as Halocarbons 13, 23 and 116.

 

Cylinder Information

Cylinder Style Connection CGA Pressure psig Gross Weight lb
AT 580, 320 1800 200
K 580, 320 1800 172
When ordering, please add the desired cylinder style to the end of the above part number.

 

To view this page in our catalog click here.